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Build Your Online Product Catalogs?
Product Name: |
Protech PECVD system for thin film coating
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Supply Ability: |
1 set |
Related proudcts |
pecvd, rf power, cvd system, |
Specifications |
Dia. 80x 440x1000mmLength |
Price Term: |
T/T, Western Union, Paypal |
Port of loading: |
Zhengzhou |
Minimum Order |
1 set |
Unit Price: |
36700USD/set |
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Name Item Data 1) RF power Max. power 500W RF frequency 13.56MHz Reflection power 200W RF power output port 50Ώ Cooling 208~240VAC 2) Preheating furnace Max. temperature 1200C Working temperature 0~1150C Temperature control Digital programmable and PID automatic control Temperature accuracy +/-1.C Working chamber Dia. 80x 440x1000mmLength Power supply 208V~240V, 50/60Hz 3)Anti-corrosive pressure gauge Brand Inficon Type Anti-corrosive, gas-type independent high accuracy and reproducibility at atmosphere Easy to change plug and play sensor element 4) Vacuum pump set Max. Vacuum pressure 10E-2Torr Type Heavy duty rotary vane vacuum pump Model PT-RT-4 5) Gas mixer tank Four precise MFC with digital display to control the gas flow automatically MFC1 Flow range from 0~100sccm MFC2 Flow range from 0~200sccm MFC3 Flow range from 0~500sccm MFC4 Flow range from 0~1000sccm The flow range are optional according to your concrete working condition Needle valve and connect tubes are also included |
Company: |
Zhengzhou Protech Mechanical Equipment Co,. Ltd.
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Contact: |
Ms. Jessica Zhang |
Address: |
No.11 Zhengshang Road, Zhengzhou City, China |
Postcode: |
450000 |
Tel: |
008637156763132 |
Fax: |
008637167103035 |
E-mail: |
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