86exporter.com Home       Products Catalog      Suppliers Catalog      Log In        Sign up
      About Us
      Profile
      Products
      Contact Us


Zhengzhou Protech Mechanical Equipment Co,. Ltd.

Products >> Protech PECVD system for thin film coating

Protech PECVD system for thin film coating

Build Your Online Product Catalogs?



Description
Product Name: Protech PECVD system for thin film coating
Supply Ability: 1 set
Related proudcts pecvd, rf power, cvd system,
Specifications Dia. 80x 440x1000mmLength
Price Term: T/T, Western Union, Paypal
Port of loading: Zhengzhou
Minimum Order 1 set
Unit Price: 36700USD/set

Name Item Data
1) RF power Max. power 500W
RF frequency 13.56MHz
Reflection power 200W
RF power output port 50Ώ
Cooling 208~240VAC
2) Preheating furnace Max. temperature 1200C
Working temperature 0~1150C
Temperature control Digital programmable and PID automatic control
Temperature accuracy +/-1.C
Working chamber Dia. 80x 440x1000mmLength
Power supply 208V~240V, 50/60Hz
3)Anti-corrosive pressure gauge Brand Inficon
Type Anti-corrosive, gas-type independent
high accuracy and reproducibility at atmosphere
Easy to change plug and play sensor element
4) Vacuum pump set Max. Vacuum pressure 10E-2Torr
Type Heavy duty rotary vane vacuum pump
Model PT-RT-4
5) Gas mixer tank Four precise MFC with digital display to control the gas flow automatically
MFC1 Flow range from 0~100sccm
MFC2 Flow range from 0~200sccm
MFC3 Flow range from 0~500sccm
MFC4 Flow range from 0~1000sccm
The flow range are optional according to your concrete working condition
Needle valve and connect tubes are also included

Contact Us
Company: Zhengzhou Protech Mechanical Equipment Co,. Ltd.
Contact: Ms. Jessica Zhang
Address: No.11 Zhengshang Road, Zhengzhou City, China
Postcode: 450000
Tel: 008637156763132
Fax: 008637167103035
E-mail:         


Copyright© Zhengzhou Protech Mechanical Equipment Co,. Ltd. All Rights Reserved.
Tel : 008637156763132 Fax : 008637167103035
Powered by 86exporter.com