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Build Your Online Product Catalogs?
| Product Name: |
Protech plasma cleaner with vacuum pump PT-DZ-2LC
|
| Supply Ability: |
1 set |
| Related proudcts |
vacuum cleaner, plasma cleaner, rf plasma cleaner, |
| Specifications |
Dia. 100mmx270mm |
| Price Term: |
EXW |
| Port of loading: |
Zhengzhou |
| Minimum Order |
1 set |
| Unit Price: |
6420USD/set |
|
Application
It is used to clean and remove the nanoscale organic contamination on wafer with Argon, Oxygen, or mix gas plasma. The rate of organic removal is about 10 nm/min Max. at PF power.
Outstanding features
Plasma cleaner
Cleaning nanoscale organic contamination
Equipped with vacuum pump
Adjustable RF power
Safe operation and environmental friendly
Suitable for most of the materials such as, metal, semi conductor, oxidate, and most of the high polymer material, etc.
Main technical specification
Model PT-DZ-2LC
Input power AC 110V-220V for your option
The max. current <=1.2A (vacuum pump not included)
RF frequency 40KHz ( offset not more than 0.2KHz)
Concrete resistance protection <50Ώ
Vacuum degree 30Pa~100Pa
Flow range 10~100mL/min adjustable
Processing control MCU manual or automatic for your option
Cleaning time 1~6000s adjustable
Inside chamber size Dia. 100mmx270mm
Gas source input Two way basic gas flow control (or more ways for your option)
The gas can be Ar, oxygen, air, etc. |
| Company: |
Zhengzhou Protech Mechanical Equipment Co,. Ltd.
|
| Contact: |
Ms. Jessica Zhang |
| Address: |
No.11 Zhengshang Road, Zhengzhou City, China |
| Postcode: |
450000 |
| Tel: |
008637156763132 |
| Fax: |
008637167103035 |
| E-mail: |
|
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